Analysis of Objectives for Multi-criteria Scheduling in Semiconductor Manufacturing
Jeremy Berthier  1@  , Stéphane Dauzere-Peres  2@  , Claude Yugma  3@  , Nicolas Guichard@
1 : Ecole Nationale Supérieure des Mines de Saint-Etienne, Centre Microélectronique de Provence
Ministère du Redressement productif
CMP - Site Georges Charpak 880, route de Mimet F-13541 Gardanne - France -  France
2 : Département Sciences de la Fabrication et Logistique  (SFL-ENSMSE)
Ecole Nationale Supérieure des Mines de Saint-Etienne, CMP-GC
880, route de Mimet 13541 GARDANNE - FRANCE -  France
3 : Ecole Nationale Supérieure des Mines de Saint-Etienne, Centre Microélectronique de Provence  (EMSE-CMP)
Ministère du Redressement productif
CMP - Site Georges Charpak 880, route de Mimet F-13541 Gardanne - France -  France

Semiconductor manufacturing includes the most complex manufacturing processes. Scheduling problems to be addressed at the operational level involve a rich set of constraints and criteria. In this presentation, industrial scheduling objectives are analyzed, and their limits are highlighted. New objectives are derived from them, and strategies are proposed for them using industrial data of this area. Finally, data-driven strategies are also discussed for the multi-objective handling.


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